One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.
Sensitivity analysis should be considered a pre-requisite for statistical model building in any scientific discipline where modelling takes place. For a non-expert, choosing the method of analysis for their model is complex, and depends on a number of factors. This  book guides the non-expert through their problem in order to enable them to choose and apply the most appropriate method. It offers a review of the state-of-the-art in sensitivity analysis, and is suitable for a wide range of practitioners. It is focussed on the use of SIMLAB – a widely distributed freely-available sensitivity analysis software package developed by the authors – for solving problems in sensitivity analysis of statistical models. <p> Other key features: <ul> <li>Provides an accessible overview of the current most widely used methods for sensitivity analysis. <li>Opens with a detailed worked example to explain the motivation behind the book. <li>Includes a range of examples to help illustrate the concepts discussed. <li>Focuses on implementation of the methods in the software SIMLAB - a freely-available sensitivity analysis software package developed by the authors. <li>Contains a large number of references to sources for further reading. <li> <div>Authored by the leading authorities on sensitivity analysis.</div> </ul>